Abstract
Bi0.5(Na(1 − x)Kx)0.5TiO3 (BNKT100x) (x = 0.11, 0.13, 0.15, 0.17, 0.19) thin films were deposited on Pt/Ti/SiO2/Si(1 0 0) substrates by metal-organic decomposition, and the effects of potassium content on the microstructure and ferroelectric/piezoelectric properties were investigated in detail. The coexistence of typical rhombohedral and tetragonal phases can be identified by multi-peak fitting in grazing incidence x-ray diffraction patterns, which indicates that morphotropic phase boundary (MPB) can be obtained for BNKT100x thin films. The results show that all the thin films are of single-phase perovskite structure and there is intimate coexistence of two phases in the potassium content range x = 0.13–0.17. The BNKT17 thin film is of the largest effective piezoelectric coefficient (d33eff = 98 pm V−1), which is attributed to a high degree of alignment of ferroelectric domains in the MPB region and its largest grain size. The BNKT17 thin film exhibits the classical diffuse phase transition of a relaxor ferroelectric, which is discussed by compositional inhomogeneity and polar nanoregions. This study offers useful guidelines to identify MPB of ferroelectric thin films with improved piezoelectric performance.
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