Abstract

A computer-generated hologram(CGH) was designed and produced for precisely testing the off-axis aspheric mirror with departure of 1200um in a three mirror astigmatism optical system.To solve the problem of selection of incident light position in CGH design Depended on engineering experience was likely to increase spatial frequency of CGH which reduced testing accuracy of aspheric mirror. A CGH design method was proposed based on quantitative calculation of incident light position which reduced the reliance on experience. The testing result by CGH was compared with that of non-contact profile testing method when the off-axis aspheric mirror surface was polished to 0.05λ(RMS).Two testing results show a good agreement. By CGH testing method,the surface error is 0.016λ RMS now.

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