Abstract
High performance YBa2Cu3O7−y (YBCO) films with large area (50mm-square) and 300nm-thick were prepared by a combination of excimer-laser-assisted metalorganic deposition (ELAMOD) and conventional MOD using a fluorine-free coating solution. A characteristic feature in the ELAMOD process is that KrF excimer laser is irradiated on the solution-coated surface of specimen in an ambient atmosphere. The YBCO films on CeO2-buffered r-cut sapphire substrates showed low surface resistance (Rs), high superconducting current density (Jc), and good reproducibility in both Rs and Jc. The Rs and Jc values of the films were 0.6mΩ (12GHz) and around 2.0MA/cm2 at 77.3K, respectively.
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