Large area xenon excimer lamp using floating electode in dielectric barrier discharge

Abstract

Summary form only given. High-pressure discharge in xenon were found to be strong source of excimer radiation. Excimer lamp emit in a narrow spectral bandwidth at 172 nm and therefore is candidate for good efficient lamp. Moreover mercury-free is item for environmental protection. However, existing lamps with maximum efficiencies near 20% in xenon barrier discharge are lower than conventional mercury lamp. And high firing voltage and easy streamer transition in high pressure result in lowering utility. In the present work, it is shown that the presence of in-plane directioned, the needle or triangle shaped floating electrode on dielectric barrier changes the discharge characteristics. In moderate pressure and applied voltage, concentrated electric field resulted from shape of floating electrode promotes corona discharge. In corona drift region, electric field is sufficient enough for electrons to excite xenon but not to ionize, which result in increasing efficiency. Floating electrodes are charged by external electrode beneath dielectric so that the shape and area of floating electrode, dielectric constant of glass are important factors. Experimental result shows that parallel operation of corona is possible because current is limited by dielectric. This coplanar dielectric barrier discharge enables manufacture of efficient large area flat lamp