Abstract
We present the experimental results of picosecond pulse laser microstructuring of silicon in the SF6 atmosphere using the galvanometer scanning technique. With appropriate irradiation conditions, a large variety of surface microstructures even nanostructures were produced. By rapidly scanning, a uniform array of micro-crater structure with 10nm in depth is generated on the crystal silicon surface. At low scanning speed, large area uniform self-organizing micro-grating, micro-hole, or micro-cone structure can be produced by cumulative pulses irradiation. These results suggest that picosecond laser scanning technique is a flexible method to produce uniform surface micro-nanostructures, which exhibits great potential for applications in photoelectron devices, special surface marking and surface modification.
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