Abstract
With the development of superconducting nanowire single photon detectors, increasing numbers of important applications are being explored, covering not only low-energy optical photon detection but also high-energy photon and particle detection. In this work, 100-nm-thick TaN superconducting microwire single photon detectors (SMSPDs) with large active areas were prepared for X-ray detection, and their response characteristics to X-rays were studied. The results showed that our TaN SMSPDs were able to detect X-rays at a wide range of bias currents and working temperatures. The detectors could distinguish different energy X-rays under suitable working conditions, and the energy resolving power was strongly related to the bias current.
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