Large-Area Integrated Triboelectric Sensor Array for Wireless Static and Dynamic Pressure Detection and Mapping.

Hai Lu Wang,Hua Yang Li,Guang Zhu,Shuang Yang Kuang,Zhong Lin Wang

doi:10.1002/smll.201906352

Abstract

Large-area flexible pressure sensors are of paramount importance for various future applications, such as electronic skin, human-machine interfacing, and health-monitoring devices. Here, a self-powered and large-area integrated triboelectric sensor array (ITSA) based on coupling a triboelectric sensor array and an array chip of CD4066 through a traditional connection is reported. Enabled by a simple and cost-effective fabrication process, the size of the ITSA can be scaled up to 38 × 38 cm2 . In addition, unlike previously proposed triboelectric sensors arrays, which can only react to the dynamic interaction, this ITSA is able to detect static and dynamic pressure. Moreover, through integrating the ITSA with a signal processing circuit, a complete wireless sensing system is present. Diverse applications of the system are demonstrated in detail, including detecting pressure, identifying position, tracking trajectory, and recognizing the profile of external contact objects. Thus, the ITSA in this work opens a new route in the direction of large-area, self-powered, and wireless triboelectric sensing systems.

Highlights

Flexible pressure sensors have drawn increasing attentions in the last decade by virtue of their enormous potential for uses in electronic skin,[1,2,3] human-machine interfacing,[4,5,6,7] health-monitoring devices[1,2, 8,9] and human-motion detection[2, 9,10] etc
We demonstrate a self-powered integrated triboelectric sensor array (ITSA), which is constructed by a universal combination of a triboelectric sensor array (TSA) with an array chip of CD4066
The scanning electron microscope (SEM) image of the top electrode is shown in Figure 1c, which is essentially woven fabric deposited with metal

Summary

Introduction

Flexible pressure sensors have drawn increasing attentions in the last decade by virtue of their enormous potential for uses in electronic skin,[1,2,3] human-machine interfacing,[4,5,6,7] health-monitoring devices[1,2, 8,9] and human-motion detection[2, 9,10] etc. Enabled by a simple and convenient fabrication process, the size of the ITSA can be scaled up to 38 × 38 cm2, which is much larger than the previous reported TENG-FET hybrid sensor arrays.[24,25, 30] Without any external gate voltage, the ITSA can achieve a stable current signal response under extremely low pressure (0.24 kPa) no matter how fast the external stimuli is.

Results

Conclusion