Abstract
We develop a novel and convenient method to prepare large area single-layer and multi-layer graphene through surface modification with oxygen plasma. The obtained large area single-layer graphene is dozens of microns wide in the lateral dimension and characterized by optical microscopy, atomic force microscopy. Raman spectroscopy show multilayer graphene has less disorder density than single-layer graphene. X-ray photoelectron spectroscopy (XPS) analysis shows that hydroxyl groups are formed on the HOPG surface during oxygen plasma pre-treatment. Hydrogen bonds develop between hydroxyl groups on HOPG surface and silanol groups on hydroxylated SiO2/Si substrate, which facilitate the transfer process. This study may provide a potential approach to develop graphene-based devices by using the large area lithographic printing process.
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