Large angle SOI tilting actuator with integrated motion transformer and amplifier

Abstract

In this work we report on the novel architecture and operational principle of a tilting actuator with integrated motion transformer and amplifier fabricated using single structural layer of silicon on insulator (SOI) wafer and demonstrate the functionality of the device both theoretically and experimentally. The device incorporates an integrated compliant motion amplifier realized as an eccentric elastic torsion link that transforms small out-of-plane motion of the parallel-plate electrostatic transducer into large amplitude angular motion of the tilting element. A feasibility study and evaluation of design parameters were performed using a lumped model of the device and coupled three-dimensional simulation. Experimental and model results indicate that this generic architecture, combining simple fabrication process with robustness of SOI-based devices, is efficient for static and resonant operation of various tilting microdevices.