Year-end Sale % OFF 
Abstract
The simulation of lapping to correct the surface profile of a workpiece has been made very little study. In contrast, the simulation of polishing has been developed using the gap theory and it has been demonstrated that there is good agreement between simulated and experimental results. Our study investigates the application of polishing simulation to lapping. We have reported that a lapped profile can be calculated if a suitable value of relative elastic coefficient is used. This paper describes workpiece and tool profiles lapped with a small tool, and corresponding simulation results calculated using the gap theory, for oscillation lapping to planarize a quartz glass wafer. Under non-oscillation conditions, the experimental results for workpiece and tool profiles correspond roughly with simulated results. When the tool overhangs the workpiece, to a significant extent, the experimental results do not correspond with the simulated ones. Therefore, the slope of the pressure distribution for the simulation was adjusted to increase rapidly when the amount of overhang is more than 30 % of tool diameter. As a result, the experimental and simulation results corresponded very closely. In uniform-oscillation-speed lapping, it was demonstrated that the achieved workpiece and tool profiles coincide approximately with the results of the simulation.
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of the Japan Society for Precision Engineering
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
