Lantern-inspired capacitive pressure sensor with wide linear measuring range

Abstract

In the field of pressure sensing, high sensitivity and linearity are two critical performance indicators, but striking a balance between them remains a prominent challenge for sensors. Existing solutions typically involve the structural design of electrodes or dielectric layers, often requiring complex and expensive techniques for designing microstructures. This study presents a novel flexible capacitive pressure sensor characterized by its low-cost nature, ease of manufacture, and scalability in design. The lantern accordion-like structure inspires the design of the dielectric layer and the porous structure is designed using thermally expandable microspheres (TEM). The synergy of surface microstructures and internal microstructures results in a high sensitivity of 3.07 × 10−3 kPa−1 within a wide linear response range of 0–100 kPa. The developed sensor is also evaluated for its weight detection capabilities, highlighting its promising weight and pressure data acquisition.