Abstract
The Taftø and Gjønnes three-beam dynamical analysis of large-angle convergent beam electron diffraction (Ultramicroscopy 17 (1985) 329) has been generalized to include high-order Laue zone corrections and has been applied to non-centrosymmetric strained layer superlattices (SLSs). The method of intersecting Kikuchi lines has been used to measure the structure factors of the Ge x Si 1− x SLS and to determine the alloy composition.
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