Abstract
In this paper we describe the optimization of transmission X-ray targets by Monte-Carlo simulation for a laboratory X-ray microscopy setup. We identified two optimal target layer thicknesses (0.1 μm and 0.7 μm) for a high-resolution target and a high-flux target. Measurements show a decrease in focal spot size by one third or an increase in X-ray flux by a factor of three compared to those of a standard micro-focus target. Focal spot sizes down to 154 nm and 260 nm are achievable with the optimized targets. Simulation results for the X-ray flux match well to the experimental results, whereas the results for the focal spot sizes still show discrepancies attributed to the simplified simulation setup.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
