Laboratory Experiment in Semiconductor Surface-Field Effects

Abstract

A laboratory instructional program involving metal-insulator-semiconductor (MIS) devices is described. At the University of California, Santa Barbara (UCSB), this program has been used to teach the theory and applications of semiconductor surface field effects. A two-part laboratory experiment is described. In the first part, students become familiar with the important parameters of a simple MIS device and learn measurement techniques. In the second part, device fabrication procedures are learned and supported by measurement techniques mastered in the first part. As an upper-division or first-year graduate laboratory experiment, this program is found to be an excellent way of introducing students to independent experimentation.