Abstract
We report on the use of CoFeTaB metallic glass thin film as a soft magnetic underlayer which promotes the growth of L10 FePt along the preferred (111) crystallographic direction. The preferred oriented phase of L10 FePt is obtained by either in situ deposition upon a heated CoFeTaB/SiO2/Si or at room temperature (FePt/CoFeTaB/SiO2/Si) followed by annealing at 400–450 °C for 15 min. The latter process is shown to be advantageous in terms of the fabrication of patterned media. Pattern sizes ranging from 25–100 nm made from L10 FePt (111)/glassy CoFeTaB were fabricated by photo/electron beam lithography. The structural and magnetic characterizations strongly suggest the applicability of the present bilayered structure in the fabrication of high density bit-patterned magnetic recording media.
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