Abstract
The plasma plume created above a graphite target irradiated by a KrF laser beam (248 nm) has been investigated using three experimental methods: ion detection, time and spatially resolved emission spectroscopy and double Langmuir probe. Measurements give information on the energetic distribution of ionic species, on the kinetic temperature of the gas and on the electronic density of the plasma plume. Carbon thin films have been deposited on silicon substrates: for high fluence values (above 1000 J cm −2) and low temperature (30°C), the films are harder than c-BN, their refractive index is 2.4, and XPS analysis gives spectra with a high sp 3 configuration.
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