Kossel and pseudo Kossel CCD pattern in comparison with electron backscattering diffraction diagrams

Abstract

Kossel and pseudo Kossel interferences, i.e. lattice source interferences (LSI) and divergent beam X-ray interferences (DBI), as well as electron backscattering diffraction (EBSD) are complementary physical methods of investigation, by means of which material-physical parameters can be obtained from microscopic small specimen areas in a non-destructive way. The interferences are taken with a high-resolution and time-integrating CCD camera [in Proceedings of the 15th International Congress on X-Ray Optics and Microanalysis (ICXOM), August 1998, Antwerp, Belgium; J. Anal. At. Spectrom. (The Royal Society of Chemistry) 14 (1999) 409] and at once transmitted to the computer for evaluation. Thus, these techniques can be used in situ. For the methods LSI and DBI, the reflections are indexed and evaluated with the own developed simulation program KOPSKO [Cryst. Res. Technol. 34 (7) (1999) 801]. In the present case, these three methods, besides other detectors, were additionally installed by us in the CamScan CS44 scanning electron microscope for the analysis of micro regions in solids. Because of the different excitation or diffraction ranges of the techniques, information comes from different specimen depths of some nanometers to about 100 μm. On this way, the range of application for the determination of the parameters was considerably increased. By the examples of a single-crystalline ceramic specimen of BaTiO 3 as well as a Fe monocrystal one the range of application is demonstrated by the determination of the crystallographic direction with respect to the specimen surface all three methods are compared.