Knowledge acquisition from batch semiconductor manufacturing data

Abstract

Semiconductor manufacturing data consist of the processes and the machines involved in the production of batches of semiconductor circuit wafers. Wafer quality depends on the manufacturing line status and it is measured at the end of the line. We have developed a knowledge discovery system that is intended to help the yield analysis expert by learning the tentative causes of low quality wafers from an exhaustive amount of manufacturing data. The yield analysis expert, by using the knowledge discovered, will decide on which corrective actions to perform on the manufacturing process. This paper discusses the transformations carried out within the data from raw data to discovered knowledge, and also the two main tasks performed by the system. The features of the inductive algorithm performing those tasks are also described. Yield analysis experts at Lucent Technologies, Bell Labs Innovations in Spain are currently using this knowledge discovery application.