Abstract
A nano-focusing module based on two linear Fresnel zone plates is presented. The zone plates are designed to generate a kinoform phase profile in tilted geometry, thus overcoming the efficiency limitations of binary diffractive structures. Adjustment of the tilt angle enables tuning of the setup for optimal efficiency over a wide range of photon energies, ranging from 5 to 20 keV. Diffraction efficiency of more than 50% was measured for the full module at 8 keV photon energy. A diffraction limited spot size of 100 nm was verified by ptychographic reconstruction for a lens module with a large entrance aperture of 440 μm × 400 μm.
Highlights
Synchrotron-based chemical imaging techniques, like scanning x-ray fluorescence microscopy (SXFM), x-ray absorption spectromicroscopy and micro x-ray diffraction, all require highly efficient focusing of hard x-rays
A nano-focusing module based on two linear Fresnel zone plates is presented
Diffraction efficiency of more than 50% was measured for the full module at 8 keV photon energy
Summary
Synchrotron-based chemical imaging techniques, like scanning x-ray fluorescence microscopy (SXFM), x-ray absorption spectromicroscopy (microXAS) and micro x-ray diffraction (microXRD), all require highly efficient focusing of hard x-rays. The most popular devices for focusing x-rays to small spot sizes are curved mirrors in the Kirkpatrick-Baez arrangement [1]. These systems have low losses, are achromatic, and micron spot sizes can be routinely achieved with various commercial systems. Systems capable of 100 nm spot sizes or below are very complex and costly, as the manufacture and alignment of sufficiently perfect mirror surfaces requires tremendous effort. This is true especially when the mirrors are made long enough to accept relatively large beams of several hundred microns in cross section
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