Abstract
The structure and electron beam induced crystallization kinetics of amorphous ZrO2 films obtained via ion-plasma and laser sputtering were compared. The studies were performed by electron diffraction and transmission electron microscopy with recording video films in situ. The effect of an electron beam on an amorphous film in a vacuum was accompanied by the formation of zirconia microcrystals with an FCC lattice. For laser evaporation, the density of crystallization nuclei was β ~ 109 cm–2, and the characteristic length unit was D0 ~ 0.48 μm. For ion-plasma evaporation, β ~ 1010 cm–2, and D0 ~ 0.06 μm. The kinetic curves of the crystallization of amorphous films were analyzed using the β-variant of the Kolmogorov model as a basis.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
