Abstract
The kinetics of nitridation of polycrystalline Mo by N 2 + and N + have been investigated in the 7.5–100 eV impact energy range. Auger electron spectroscopy has been used to monitor the nitride growth as a function of ion fluence and energy for both N 2 + and N +. Bi-exponential nitride concentration versus dose curves are typical of this system. These data are interpreted within a proposed model which employs both surface and subsurface nitrogen binding sites and incorpo- rates sputtering and bombardment induced transport between the two layers. Fitting this model to the data yields apparent reaction cross sections σ and the extent of nitridation Δ N. Two measures of initial capture probability, (1) the experimental initial slope and (2) the product σΔ N, are used to characterize reactivity.
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