Abstract
The heterogeneous decay kinetics of chlorine and hydrogen atoms in plasmas of HCl mixtures with Ar, H2, O2, and Cl2 of variable initial composition have been studied using optical and spectral diagnostics methods and plasma simulation. It has been shown that the assumption about the constant recombination probability is inconsistent with the behavior of calculated concentrations of atoms depending on their reduced emission intensity. Mechanisms for the effect of the initial composition of the mixtures on the recombination probability have been proposed.
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