Kinetics of carbon nanopillar formation on a pyrolytic graphite surface during reactions induced by a focused electron beam

Abstract

The results from a series of height measurements of carbon nanopillars formed during residual hydrocarbon deposition on a pyrographite surface by a focused electron beam in an SEM are presented. The high initial velocity of the pillars’ vertical growth can be explained by the dominant role of surface diffusion in the influx of molecules to the irradiated area. It is shown that progressive contamination of the substrate at distances up to several micrometers from the point of impact of the primary beam delays growth, and, in the case of long-time exposure, results in the evaporation of the pillars.