Abstract

In this paper, the stick-slip effect was introduced and a prototype of trans-scale precision positioning stage based on the stick-slip effect was designed. The electro-mechanical conversion model of PZT actuator was built by the capacitance charge-discharge formula and the step model of PZT actuator. According to the structure of the prototype, the second-order oscillation model of inertial mass was also deduced and simulate in Matlab-Simulink software. Base on kinetic experiment, the simulation results of second-order oscillation model of inertial mass was validated by the experiment results. The oscillation model of inertial mass well reflects the oscillation phenomenon in each step of stick-slip driving and improves the accuracy of the input displacement signal in the modeling of stick-slip driving compared with only using the step model of PZT actuator.

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