Abstract

Abstract Self-consistent electron energy distribution functions (EDFs) in carbon monoxide discharges have been calculated by solving the Boltzmann equation coupled to the vibrational master equation and to the plasma chemical kinetics operating in the discharge. The results show a strong coupling between EDF and the vibrational distribution and the chemical composition of the plasma. The consequent temporal evolution of EDFs is analyzed on the basis of the relevant relaxation times characteristic of different processes occurring under plasma conditions.

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