Abstract
AbstractSummary: Emission of PFCs (perfluorocompound) has attracted much attention in recent years due to its relatively high contribution to the global warming. Non‐thermal plasma is one of the most promising technologies to effectively control the PFC emissions. In this study, a cylindrical DBD (dielectric barrier discharge) reactor is adopted for the treatment of NF3‐containing streams. Besides the experimental work, a numerical model is also developed for better understanding of the reaction mechanism of NF3 abatement in N2/NF3 mixtures. Good agreement is observed between the experimental data and the simulation results. Simulation results indicate that the electrons and the N atoms are the major active species responsible for the NF3 decomposition. In addition, N2(A3Σ) metastables plays a significant role in the NF3 abatement. A simplified mechanism for the NF3 decomposition in the N2 – NF3 plasmas is proposed as well.Reaction mechanisms for the decomposition of NF3 in a N2 – NF3 plasma.imageReaction mechanisms for the decomposition of NF3 in a N2 – NF3 plasma.
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