Kinetic Modeling Of Axially Non-Uniform Cylindrical Magnetron Discharge

Abstract

Cylindrical magnetron discharges (CMD) with two co‐axial electrodes and a uniform magnetic field being directed axially, represent relatively simple systems for theoretical studies that can contribute to better understanding of discharge operation. The dc discharge in Ar at pressure 3 Pa, magnetic field strength 100 G and current 150 mA is considered where the pronounced non‐local regime of the electron distribution function (EDF) formation is realized. The electron component is analyzed on the basis of radially and axially inhomogeneous Boltzmann kinetic equation. Unmagnetized electrons, which move in axial direction are trapped in the axial potential well, their energy relaxation length is large, and the kinetic equation can be averaged over discharge length. Using a model two‐dimensional potential profile, the EDFs at different axial positions are obtained and spatial distributions of the electron density and ionization rate are represented and discussed. The results of the modeling can be used for exp...