Abstract
Experimental data on the kinetic regularities of aerosol SiO2 formation in the course of dichlorosilane oxidation by oxygen at different initial pressures, compositions of the reaction mixture, and temperatures ranging from 380 to 578 K are presented. It is shown that the regularities of the process, including the specific feature of the transition from the regime of solid phase formation in the form of a film to the regime of aerosol formation can be explained on the basis of the Volmer–Weber–Frenkel–Zeldovich nucleation theory taking into account the branched chain nature of the reaction. The conditions for the transition of chain combustion into the regime of chain–thermal explosion almost coincide with the conditions of intensive formation of aerosol. The SF6 additives inhibit the process and thereby increase the dispersity of aerosol and the minimal pressure of its formation.
Published Version
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