Abstract
A design is reported for a system of transferrable sample holders and mating experimental stations, that allows samples to be transferred between preparation and analysis tools with high positional accuracy. The sample holders are designed to be manipulated/transported using standard “ESCA stub” compatible hardware. Provisions are made for heating, cooling, and temperature measurement.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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