Abstract
The design of a planar micro parallel-link mechanism that allows for two translation motions and one rotation motion was discussed. The micro parallel-link mechanism uses comb-drive actuators with gear chain systems coupled to a rack-and-pinion to provide fine increments of linear motion. The micro parallel-link mechanism was designed to be fabricated using surface micromachining technology. The kinematic design and dynamic analyses of the parallel-link mechanism were discussed. A user interface for the position control of the micro actuator/mechanism was developed. Simulations were conducted to analyze the dynamic performance of the designed micro mechanism. The results show that the micro mechanism is capable of precision position control with multiple degrees of freedom.
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