Kilovolt electron backscattering

Abstract

We present here the results of experiments measuring the energy spectra of electrons backscattered from massive homogeneous Al, Cu, Pd and W targets, with the probing beam primary energyE0 varying from 4–32 keV. We have developed the electron backscattering theory based on solving the Boltzmann equation boundary problem by the invariant imbedding method and calculation of inelastic energy loss with the modified Landau function. Comparison of the calculated with experimental data shows that this expanded theory adequately describes the electron reflection processes.