(Keynote) Solid-State Nanopore Fabrication with Conventional Process

Abstract

In this paper, the progress of solid-state nanopores fabrication is reviewed after a brief summary of the basic principle of the new DNA sequencing technology based on solid-state nanopores. The pore-size shrinking technique for the pores with a diameter below 10 nm is highlighted. Based on an analysis on the current works, it can be concluded that the conventional micro-nano processing technology combination with the pore-size shrinking technique are an effective way for mass fabrication of the solid-state nanopores.