Abstract

为了满足可见-近红外波段的高光谱分辨率和高灵敏观测需求, 采用大面阵、低噪声碲镉汞焦平面制备技术和低损伤衬底去除技术, 成功制备了高信噪比大面阵可见/近红外碲镉汞焦平面探测器。无损衬底去除技术采用机械抛光和化学腐蚀相结合的方法, 使焦平面的响应波段拓展至400 nm~2 600 nm。采用信号定量化焦平面测试评价手段对可见/近红外碲镉汞焦平面的性能进行评估, 640×512 25 <i>μ</i>m中心距碲镉汞焦平面的波段量子效率可达到88.4%, 信噪比达到287, 有效像元率大于98%, 能够获得清晰的可见和近红外波段图像。

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