Key Characteristics Analysis of Vibration Isolator Used in High Precision Testing Equipment

Abstract

Ground vibration is an important harmful factor affecting the use of mechanical equipment. Especially in recent years, with the continuous progress of science and technology, the accuracy of various precision processing and testing equipment is getting higher and higher. According to the vibration isolation requirements of the high-precision silicon wafer inspection platform, this paper conducts in-depth research from three aspects of vibration isolator structure design, mathematical model analysis and dynamic simulation analysis, and designs an air spring isolator with strong bearing capacity, low stiffness and height positioning in the vertical direction. The vibration isolator achieves low rigidity through the pendulum mechanism and rubber diaphragm, the vertical position control is achieved by the height valve, and the vibration is eliminated by using damping oil and adjustable damping holes. This paper first designs the structure of the vibration isolator, then analyzes the structural parameters based on the mathematical model, and studies the effects of parameters such as load quality and orifice size on the vertical vibration isolation characteristics of the vibration isolator. The vibration isolator is simulated and analyzed, and the working principle of the main mechanism is studied, which provides a theoretical basis for the optimal design of the air isolator and the pendulum mechanism. Finally, the feasibility of forming a vibration isolation system is discussed. Simulation analysis shows that the vibration isolator system has good stability and leveling characteristics.