K–edge X–ray absorption spectra of argon in sputtered aluminum films

Abstract

We have measured K–edge X–ray absorption spectra of argon in sputtered aluminum films at a synchrotron radiation facility (the Photon Factory). We found that the energy and shape of white line change when the film is annealed at 500 °C and the spectrum becomes resembling that of argon implanted in silicon. From the analyses of the X–ray absorption spectra and TEM observation we concluded that argon exists as very small atom clusters with a diameter less than 1 nm or exist as isolated atoms in the as–sputtered aluminum film, and that the size of the clusters become as big as 10 nm diameter when the film is heated.