Abstract
A K-band bandpass filter (BPF) based on the fully micromachined substrate integrated waveguide (SIW) structure has been demonstrated. In the proposed SIW platform, borosilicate glass reflowed into the silicon trench is used as a dielectric substrate, and the vias are formed by filling the glass mould with electroplated copper after removing the embedded silicon part. The BPF's characteristics are realised by introducing dual inductive post structures into the SIW platform. The insertion loss and 3 dB bandwidth of the fabricated BPF were measured to be 2.46 dB at 29 GHz and 7.2%, respectively. The proposed BPF platform has high potential for low-loss, compact SIW-based millimetre-wave tunable filters owing to its mechanical robustness and integrity with MEMS tuning devices.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
