Abstract

Nanostructures based on buried interfaces and heterostructures are at the heart of modern semiconductor electronics as well as future devices utilizing spintronics, multiferroics, topological effects, and other novel operational principles. Knowledge of electronic structure of these systems resolved in electron momentum k delivers unprecedented insights into their physics. Here we explore 2D electron gas formed in GaN/AlGaN high-electron-mobility transistor heterostructures with an ultrathin barrier layer, key elements in current high-frequency and high-power electronics. Its electronic structure is accessed with angle-resolved photoelectron spectroscopy whose probing depth is pushed to a few nanometers using soft-X-ray synchrotron radiation. The experiment yields direct k-space images of the electronic structure fundamentals of this system—the Fermi surface, band dispersions and occupancy, and the Fourier composition of wavefunctions encoded in the k-dependent photoemission intensity. We discover significant planar anisotropy of the electron Fermi surface and effective mass connected with relaxation of the interfacial atomic positions, which translates into nonlinear (high-field) transport properties of the GaN/AlGaN heterostructures as an anisotropy of the saturation drift velocity of the 2D electrons.

Highlights

  • Nanostructures based on buried interfaces and heterostructures are at the heart of modern semiconductor electronics as well as future devices utilizing spintronics, multiferroics, topological effects, and other novel operational principles

  • The QWS1 embeds larger partial ns and is localized closer to the interface compared to the QWS2, which is shifted into the V(z) saturation region

  • Our direct k-space imaging of the fundamental electronic structure characteristics—Fermi surface (FS), band dispersions and occupancy, and Fourier composition of wavefunctions—of the 2DEG formed in high-frequency GaN-high-electron-mobility transistors (HEMTs) with ultrathin barrier layer makes a quantitative step compared to conventional optics and magnetotransport experiments

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Summary

Introduction

Nanostructures based on buried interfaces and heterostructures are at the heart of modern semiconductor electronics as well as future devices utilizing spintronics, multiferroics, topological effects, and other novel operational principles. Its spatial separation from defects in the doped barrier layer and in the interface region—in contrast to conventional transistor structures where the 2DEG is formed by doping—allows the electrons to escape defect scattering and dramatically increase their mobility μe, limited only by phonon scattering This fundamental operational principle of HEMTs boosts their high-frequency performance, which is exploited in a wide spectrum of applications such as cell phones. Recent progress in molecular beam epitaxy (MBE) technology, in pursuit of yet higher operation frequencies of these devices, has allowed fabrication of heterostructures with ultrathin barrier layers of 3–4 nm[20,21,22], which make them ideally suited to SX-ARPES This has allowed direct k-space imaging of the fundamental electronic structure characteristics—the FS, electron dispersions, and the Fourier composition of wavefunctions—of the interfacial 2DEG in such heterostructures

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