K-1710 非対称容量結合プラズマの特性(J08-3 熱流体現象の原子・分子論的アプローチ(3))(J08 熱流体現象の原子・分子論的アプローチ)

Abstract

Most of capacitive discharges are asymmetric because non-driven electrode and chamber walls are naturally grounded than driven. The dc (time-averaged) voltage between the plasma and the driven electrode is then larger than the dc voltage between the plasma and the grounded electrode. Since ions employed in plasma etching are accelerated by the voltage. it is important to examine the effects of the electrode area ratio on the self-bias voltage and the plasma potential. Radio-frequency discharges of argon between two concentric spheres are analyzed using the Particle-in-Cell/Monte Carlo method. The effect of the electrode area ratio on the self-bias voltage and the plasma potential is clarified for various amplitudes.