Abstract

In this paper Joule heating effect of metallization in different widths and materials has been tested under varied current density stresses according to the relation of resistance and temperature of metal stripes. The high density current in the metal stripes created the great temperature increase due to Joule heating effect. It seriously affected evaluation of MTF and accuracy of current density exponent value in the metallization electromigration experiment. The MTF values have been corrected on the basis of the real temperature of stripes, and the corrected exponent n has been obtained.

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