J2240402 FIB加工した超硬試験片の引張試験と機械物性のサイズ効果([J224-04]『マイクロ・ナノ機械の信頼性』のための材料創製・測定・解析技術 金属および酸化物の強度と破壊)

Abstract

Cemented carbide is typically used as material for working tool because it has superior characteristics, such as very high Young's modulus, excellent rigidity, good chemical inertness, and good thermal stability. This research focuses on investigating the possibility of WC-Co cemented carbide as structural material in MEMS. WC-Co cemented carbide nanowires (NWs) are prepared using focused ion beam (FIB) fabrication technique. The NWs are tensioned using a MEMS tensile test device that we have developed. The Young's modulus and fracture strength are affected by sample size, WC-to-Co ratio, and the WC-Co interface angle to tensile direction.