Abstract
In this report, we propose a double-side-drive MEMS optical chopper for time-resolved micro Raman spectroscopy to evaluate the local dynamic stress of Si resonators. The chopper is used as a mechanical pulse width modulator for the incident laser installed to a commercial micro Raman spectrometer. The advantages are; 1) mechanical chopping, which can maintain the quality of source incident laser 2) small size for easy installation to the Raman spectrometer 3) low cost and low voltage operation. The chopper fabricated using silicon on glass (SOG) with alignment anodic bonding process was operated by electrostatic force using tilted comb electrodes. The measured mechanical response has no overshooting and the response time was about 32 μs. This result satisfies the requirement for the dynamic stress measurement of silicon structure resonating up to 1 kHz. The measured optical response showed that the incident laser was modulated but the extinction ratio of modulated laser was low due to stray light.
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