Abstract
J2240201 PZT薄膜及びナノロッドの圧電特性に及ぼす基板拘束の影響([J224-02]『マイクロ・ナノ機械の信頼性』のための材料創製・測定・解析技術 マイクロ・ナノ実験力学と機能材料)
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