Abstract

In this study, to obtain knowledge necessary to establish research direction in developing high sensitivity and low power consumption micro current sensors, we investigated the sensor output of a micro current sensors consisted of a cantilever equipped with a piezoelectric film (PVDF) and a soft magnetic material (Fe). From the viewpoint of structure science, the research results indicated that the sensor output rapidly increases at the resonant frequency. Furthermore from the viewpoint of materials science, it revealed that careful shape design to align magnetic moments is inevitable to employ large magnetization of the soft magnetic materials to increase the sensor output.

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