Abstract

Biomolecules monitoring methods has been studied for the management of diseases like diabetes or hyperlipidemia for several decades. In this study, we report on a novel high sensitive electrochemical therml micro sensor based on VO_2 for an enzymatic healthcare monitoring system. In the process of glucose oxidation with the catalysis of enzyme, heat will be generated, which can be measured by a high sensitive thermal micro sensor so that the concentration of glucose solution can be calculated. A VO_2 thin film is used as a material of thermal micro sensor due to its high temperature coefficient of resistance of 15000 ppm/℃. The VO_2 thermal micro sensor is fabricated by the technology of MEMS with high temperature resolution of 0.299 mV/√Hz. This sensor has been utilized for the estimation of glucose concentration as an example. The result of glucose estimation indicates that the time rate of the output signal has positive correlation with glucose solution concentraitons.

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