Abstract
Wurtzite (AlTi)N with high crystallinity has the NTC (negative temperature coefficient) thermistor property, which is applicable to an ultra thin temperature sensor on a thin polyimide film. The flexible sensor actually requires the mechanical reliability for operation, thus, the mechanical property, especially the toughness of the interface between an (AlTi)N thin film and a polyimide film was quantitatively evaluated by sub-micron scale fracture test. In addition, the effect of the fabrication process on the toughness was investigated with different types of specimens in order to elucidate the mechanism of the interface adhesion.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: The Proceedings of Mechanical Engineering Congress, Japan
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
