Abstract
A whole field shape measurement using a grating projection method was performed to investigate noise characteristics of the shape measurement results A spherical mirror model whose diameter was 0 299x10^<-3>m and focal point distance was about 2 981m was measured Through the 30 times shape measurements of the spherical mirror model, a systematic and a random error of the measurement noises were derived, and their characteristics were discussed From the results, it was shown that the systematic errors appeared with a wavelike band whose wavelength was related to that of the projected grating pattern and the random errors following the normal distribution occurred with a spatially-uncorrelated
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