Abstract
The authors are developing a manufacturing process of a metal nano dot array on a plastic substrate. In this paper, machining technology of a quartz glass substrate with fine groove array used for the process is studied. It is shown that a fine groove narrower than 300 run can be machined on a quartz glass plate by using a specially designed machining tester. It is also demonstrated that a fine groove array of a large area (1cm × 1cm) can be fabricated.
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