Abstract

Carbon Nitride (CNx) coating shows ultra low friction coefficient (μ<0.01) in dry Nitrogen gas. Transformed layer is important to show low friction, but it is not clear what the ultra low friction mechanism is. To clarify low friction mechanism, hardness of transformed layer is important to measure friction coefficient quantitatively from Hailing's friction model. In this study, we estimated the hardness of CNx coating by using optical properties during friction test. As a result, we could estimate the hardness of CNx coating by using reflectance spectroscopy within a tolerance of 5.0 % compared to AFM nano scratch test. And hardness of transformed layer is correlated to friction coefficient after transformed layer was generated.

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