Abstract

As development of micro-electro-mechanical-systems (MEMS) technology, microforming is gaining attention because of some advantages such as material and structural flexibility, low prices, and high production rate. Heat assisted microforming not only the improve material formability and the tools life but also decrease the energy consumption because the heat capacity is very small in microforming. However, the forming accuracy is decreased by heating tools and equipment. Therefore it is necessary to satisfy the energy efficiency and the forming accuracy for practical stage application. We designed the heat assisted microforming equipment with resistance heating which is capable of heating only workpiece material without tools. The performances of the equipment were evaluated by measuring the relationship between the temperatures and the energy at different contact conditions with tools. The heat loss energy was also evaluated and considered to the effect of thermal deformation of tools. The drawing tests were carried out and the results showed the equipment is capable to improve the formability at elevated temperatures.

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