Abstract
We are proposing a liquid rate gyro named "ECF micro rate gyro". Although the sensing principle is based on that of a conventional gas rate gyro, the liquid micro rate gyro works by an electro-conjugate fluid (ECF) instead of a gas. The electro-conjugate fluid is a dielectric fluid that works as a functional fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. In our previous study, we propose a MEMS fabrication process of ECF jet generator, flow channel and sensing hot wire, which are parts of the ECF micro rate gyro, and confirmed a function of the ECF rate gyro constructed by those MEMS-based components. In this study we focus on fabrication of all of MEMS-based components for ECF rate gyro on a single glass chip and improvement of MEMS based sensing hot wire. Although fabricated single chip ECF rate gyro is functional as a rate gyro, further improvement of MEMS-based hot wire will be necessary to achieve less heat loss and better resistance control.
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